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Scaleable Nanomanufacturing Of Metasurfaces Using Microsphere Photolithography, Chuang Qu

Doctoral Dissertations

“The cost-effective manufacturing of metasurfaces over large areas is a critical issue that limits their implementations. Microsphere photolithography (MPL) uses a scalable self-assembled microsphere array as an optical element to focus collimated light to nanoscale photonic jets in a photoresist layer. This dissertation investigates the fabrication capabilities, process control, and potential applications of MPL. First, the MPL concept is applied to the fabrication of metasurfaces with engineered IR absorption (e.g. perfect absorption with multiband/broadband and wavelength/polarization dependences). Improving the patterning of the photoresist requires a fundamental understanding the photochemical photonic jet interactions. The dissertation presents a model of the MPL …