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Engineering Mechanics

Microcantilever

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Vibration Analysis Of Piezoelectric Microcantilever Sensors, Amin Salehi-Khojin May 2008

Vibration Analysis Of Piezoelectric Microcantilever Sensors, Amin Salehi-Khojin

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The main objective of this dissertation is to comprehensively analyze vibration characteristics of microcantilever-based sensors with application to ultra small mass detection and low dimensional materials characterization. The first part of this work focuses on theoretical developments and experimental verification of piezoelectric microcantilevers, commercially named Active Probes, which are extensively used in most today's advanced Atomic Force Microscopy (AFM) systems. Due to special geometry and configuration of Active Probes, especially multiple jump discontinuities in their cross-section, a general and comprehensive framework is introduced for forced vibration and modal analysis of discontinuous flexible beams. More specifically, a general formulation is obtained …


Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi Aug 2007

Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi

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Microcantilevers are one the most commonly utilized microelectromechanical systems in a variant of the ultra-precise scanning and characterization application. Of particular interest, the problem of vibrations of microcantilevers has recently received considerable attention due to its application in several nanotechnological instruments such as atomic force microscopy, nanomechanical cantilever sensors and friction force microscopy. For applications such as these, the problem of coupled flexural-torsional nonlinear vibrations of a piezoelectrically-actuated microcantilever beam is considered in this dissertation. The actuation and sensing are both facilitated through bonding a piezoelectric layer (here, ZnO) on the microcantilever surface. The beam is considered to have simultaneous …