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Tungsten Doping Induced Superior Mechanical Properties Of Hafnium Oxide For Energy Applications, Ann Marie Uribe

Open Access Theses & Dissertations

Hafnium oxide, or hafnia, is a high temperature refractory material with good electrical, chemical, optical, and thermodynamic properties. The effects of dopants have been widely studied, especially after the discovery of ferroelectricity induced in hafnia thin films. While attractive and used in the opto-electronic, memory devices, and semiconductor industries, there is a lack in the literature on enhancing the mechanical properties of hafnium oxide, specifically through doping it with tungsten, another material of interest particularly for future high temperature device applications. Thus, this work aimed to grow hafnia thin films doped with varying amounts of tungsten. The samples were grown …