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Design And Fabrication Of Nanofluidic Systems For Biomolecule Characterizations, Orain Ansel Hibbert

Graduate Theses and Dissertations

Nanofluidic channel systems were designed and fabricated by combining MEMS microfabrication with AFM nanolithography. In the fabrication process flow, photolithography was first utilized to pattern microfluidic channels and reservoirs on a 4" Pyrex substrate. Subsequently, atomic force microscopy (AFM) based nanolithography was used to mechanically fabricate nanochannels to connect the microreservoirs which formed the inlet and outlet of the nanofluidic system. A Tap190 Diamond-Like Carbon (DLC) AFM tip with a force constant of 48 N/m and a radius of less than 15 nm was used as the nanolithography tool. The resultant nanochannel ranges from 20 to 80 µm in length …