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Full-Text Articles in Engineering
Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay
Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay
Theses
The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net …
Mobile Agent Based Distributed Network Management : Modeling, Methodologies And Applications, Jian Ye
Mobile Agent Based Distributed Network Management : Modeling, Methodologies And Applications, Jian Ye
Dissertations
The explosive growth of the Internet and the continued dramatic increase for all wireless services are fueling the demand for increased capacity, data rates, support of multimedia services, and support for different Quality of Services (QoS) requirements for different classes of services. Furthermore future communication networks will be strongly characterized by heterogeneity. In order to meet the objectives of instant adaptability to the users' requirements and of interoperability and seamless operation within the heterogeneous networking environments, flexibility in terms of network and resource management will be a key design issue. The new emerging technology of mobile agent (MA) has arisen …