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Theses/Dissertations

Missouri University of Science and Technology

Operations Research, Systems Engineering and Industrial Engineering

2012

Lithography

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Full-Text Articles in Engineering

Chemical Risk In Early Design, Carlton Ashley Washburn Jan 2012

Chemical Risk In Early Design, Carlton Ashley Washburn

Masters Theses

The purpose of this thesis is to present a methodology to identify risks in the chemical product development process, including fortification of the failure mode taxonomy by including chemical failures. This work will enable comprehensive risk analysis in technology-based products that have a chemical based subsystem, such as those used in the lithography process in the semiconductor industry. This research broadened the failure mode taxonomy by identifying chemical failures from publications in the semiconductor industry. These failures were analyzed to determine the rudimentary failure modes in each case. The newly identified failure modes were added to the failure mode taxonomy. …