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Patterning And Characterization Of Carbon Nanotubes Grown In A Microwave Plasma Enhanced Chemical Vapor Deposition Chamber, Mauricio Kossler
Patterning And Characterization Of Carbon Nanotubes Grown In A Microwave Plasma Enhanced Chemical Vapor Deposition Chamber, Mauricio Kossler
Theses and Dissertations
This research studies the growth of carbon nanotubes (CNT) from a nickel catalyst to be used on a field emission device. This thesis can be divided into three sections: the construction of a vacuum chamber for field emission testing, the design and fabrication of a triode structure to enable improved electron emission, and the pretreatment and growth of CNTs. To experimentally test the field emission of CNTs, a vacuum chamber must attain a vacuum of at least 10-5 torr. Our vacuum chamber designed and built achieved a maximum, final pressure of 10-8 torr. A triode structure was designed …
Kinetics Of Laser Chemical Vapor Deposition Of Carbon And Refractory Metals, Feng Gao
Kinetics Of Laser Chemical Vapor Deposition Of Carbon And Refractory Metals, Feng Gao
Doctoral Dissertations
Three-dimensional laser chemical vapor deposition (3D-LCVD) has been used to grow rods of carbon, tungsten, titanium, and hafnium from a variety of hydrocarbons and metal halide-based precursors. A novel computerized 3D-LCVD system was designed and successfully used in the experiments. A focused Nd:Yag laser beam (λ = 1.06 μm) was utilized to locally heat up a substrate to deposition temperature. The rods, which grew along the axis of the laser beam, had a typical diameter of 30–80 μm and a length of about 1 mm. The precursors for carbon deposition were the alkynes: propyne, butyne, pentyne, hexyne, and octyne. Propyne …