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Theses/Dissertations

Nanoscience and Nanotechnology

Atomic layer deposition

University at Albany, State University of New York

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Full-Text Articles in Engineering

Development Of Low-Temperature Atomic Layer Deposition Of Ultra-Thin Ruco Direct Plate Liners For Flexible Electronics Applications, Dillon Alexander Gregory Jan 2016

Development Of Low-Temperature Atomic Layer Deposition Of Ultra-Thin Ruco Direct Plate Liners For Flexible Electronics Applications, Dillon Alexander Gregory

Legacy Theses & Dissertations (2009 - 2024)

Low temperature plasma-assisted atomic layer deposition-grown metal nanocomposite layers based on mixtures of ruthenium and cobalt have been investigated as potential copper adhesion/barrier layers in flexible electronics applications. The success of adapting this process to flexible electronics depends on the candidate barriers meeting several necessary properties including sufficient electrical conductivity, compatibility with Cu electroplating, and ability to prevent Cu diffusion into the substrate. Preliminary testing has shown that atomic layer deposition (ALD) can be used as a technique for depositing alloyed metallic barrier layers at the lower thermal constraints dictated by the use of polymer substrates and still produce continuous …


Strong Metal Support Interaction Of Pt On Tio₂ Grown By Atomic Layer Deposition And Physical Vapor Deposition For Fuel Cell Applications, Robin Paul Hansen Jan 2016

Strong Metal Support Interaction Of Pt On Tio₂ Grown By Atomic Layer Deposition And Physical Vapor Deposition For Fuel Cell Applications, Robin Paul Hansen

Legacy Theses & Dissertations (2009 - 2024)

Several roadblocks prevent the large-scale commercialization of hydrogen fuel cells, including the stability of the Pt catalysts and their substrates, as well as the high cost of Pt. This is particularly true for the cathode, which requires a higher Pt loading because of the slow kinetics of the oxygen reduction reaction (ORR). The problem with the stability of the substrate can be solved by replacing the traditional carbon support with a conductive metal oxide such as reduced TiO2, which will not easily corrode and should result in longer lasting fuel cells. In this study, Pt was deposited either by atomic …