Engineering Commons^™

Three Dimensional Photonics Structures: Design And Applications, Mansoor Sultan

Theses and Dissertations--Electrical and Computer Engineering

Photonics is an emerging technology for light control, emission, and detection. Photonic devices control photons the same way electronic circuits control electrons in active or passive mode depending on the energy requirement of the device. This dissertation will discuss the design, fabrication, testing of photonic structures with applications including imaging and renewable energy. First, we developed a novel lithography method for fluoropolymer resist based on variable pressure electron beam lithography (VP-EBL). VP-EBL proves to be an efficient method for patterning a widely used, but challenging to process, fluoropolymer, Teflon AF. However, rather than solely mitigating charging, the ambient gas is …