Engineering Commons^™

Two-Dimensional Microscanners With T-Shaped Hinges And Piezoelectric Actuators, Wenyu Song

LSU Master's Theses

For a wide range of application areas such as medical instruments, defense, communication networks, industrial equipment, and consumer electronics, microscanners have been a vibrant research topic. Among various fabrication methodologies, MEMS (microelectromechanical system) stands out for its small size and fast response characteristics. In this thesis, piezoelectric actuation mechanism is selected because of its low voltage and low current properties compared with other mechanisms, which are especially important for the target application of biomedical imaging. Although 1- and 2-dimensional microscanners with piezoelectric actuators have been studied by several other groups, this thesis introduces innovative improvements in design of the piezoelectric …