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Full-Text Articles in Engineering
A Joint Data Rate - Error Rate Analysis In Correlated Space-Time-Wireless Channels, Hui Tong
A Joint Data Rate - Error Rate Analysis In Correlated Space-Time-Wireless Channels, Hui Tong
Dissertations, Master's Theses and Master's Reports - Open
No abstract provided.
Localized Annealing Of Polysilicon Microstructures By Inductively Heated Ferromagnetic Films, Melissa L. Trombley
Localized Annealing Of Polysilicon Microstructures By Inductively Heated Ferromagnetic Films, Melissa L. Trombley
Dissertations, Master's Theses and Master's Reports - Open
The monolithic integration of dissimilar microsystems is often limited by conflicts in thermal budget. One of the most prevalent examples is the fabrication of active micro-electromechanical systems (MEMS), as structural films utilized for surface micromachining such as polysilicon typically require processing at temperatures unsuitable for microelectronic circuitry. A localized annealing process could provide for the post-deposition heat treatment of integrated structures without compromising active devices. This dissertation presents a new microfabrication technology based on the inductive heating of ferromagnetic films patterned to define regions for heat treatment. Support is provided through theory, finite-element modeling, and experimentation, concluding with the demonstration …