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Modeling Of Dual Emission Laser Induced Fluorescence For Slurry Thickness Measurements In Chemical Mechanical Polishing, Caprice Gray, Chris Rogers, Vincent Manno, Robert White
Modeling Of Dual Emission Laser Induced Fluorescence For Slurry Thickness Measurements In Chemical Mechanical Polishing, Caprice Gray, Chris Rogers, Vincent Manno, Robert White
Vincent P. Manno
Dual emission laser induced fluorescence (DELIF) is a technique for measuring the instantaneous thin fluid film thickness in dynamic systems. Two fluorophores within the system produce laser induced emissions that are filtered and captured by two cameras. The ratio of the images from these cameras is used to cancel the effect of the laser beam profile on the image intensity. The resultant intensity ratio can be calibrated to a fluid film thickness. The utilization of a 2-dye system when applied to Chemical Mechanical Polishing (CMP) is complicated by the fluorescence of the polymeric polishing pad and the light scattering particles …