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Characterisation, Modelling And Performance Evaluation Of Cmos Integrated Rf-Mems Multielectrode Tunable Capacitor, Zbigniew Olszewski

Theses

The circuits used in telecommunications are made of two types of components; active integrated circuits that have continuously been improved together with the evolution of the Si technology and off-chip and on-chip passive components. The latter did not profit from much development and now constitute the bottleneck for further integration of RF (Radio Frequency) integrated circuits. MicroElectroMechanical Systems (MEMS) is rapidly emerging as an enabling technology to yield a new generation of high performance components to replace off-chip (not integrated) and on-chip (poor performance) counterparts. The RF components (RF-MEMS) that can be fabricated with MEMS technology are mainly the resonator, …