Engineering Commons^™

Vibration Control On Linear Robots With Digital Servocompensator, Roger Kobla Kwadzogah

Theses

Control application for active damping of structural vibrations and acoustic noise in mechanical systems is one of the engineering fields that can benefit from advances made in digital signal processors. This thesis project is one such application. It is about a vibration control at the loading point of a high speed linear robotic workcell. A lead zirconate titanate piezoelectric ceramic is used as the actuator and an accelerometer provides the sensing. From experimentally measured frequency response of this system, a shaping filter is designed and added on. The reshaped system is fitted with a third order transfer function design model. …

An Interactive System For The Estimation Of Emissivity Of A Wafer In A Rapid Thermal Processing Chamber, Maurizio Fulco

Theses

Rapid thermal processing (RTP) is a method of thermally processing wafers for the manufacture of integrated circuits. During the thermal processing of wafers, it is essential that the wafer temperature follow a pre-specified temperature trajectory and that the temperature across the wafer be uniform especially at high temperatures. To ensure that the above objectives of RTP temperature control be met at any time during the process, the estimation of some parameters of the process is of fundamental importance in the design of the control system.

This thesis demonstrates the implementation of an interactive software system in which the emissivity of …