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Size Dependent Melting And Diffusion Of Silicon For Microsystem Applications, Noel Felipe Marquez
Size Dependent Melting And Diffusion Of Silicon For Microsystem Applications, Noel Felipe Marquez
Open Access Theses & Dissertations
The size dependent reduced melting point and hydrogen enhanced surface diffusion effect on silicon nanostructures was explored experimentally. SOI and silicon wafers were patterned using nanimprint lithography and dry etching to explore the reduced melting point effect; and patterned with photolithography and dry etching to explore the hydrogen enhanced surface diffusion. The nanotextured samples were annealed in a wide variety of furnaces with nitrogen, forming gas, and argon atmospheres. Nitrogen was found to block the reshaping effect while argon was found to cause extensive pitting damage in the setup used. Micropatterned samples were annealed in a low pressure hydrogen enabled …
Development Of A Micro-Catbed For Miniature Thrusters, Chance Paul Garcia
Development Of A Micro-Catbed For Miniature Thrusters, Chance Paul Garcia
Open Access Theses & Dissertations
The goal of this work is to develop a micro catalytic bed for miniature thrusters. A test bed was constructed for experimental testing to characterize several parts of the micro catalytic bed. The reactant fluid studied is 90% Hydrogen Peroxide (H2O2) by weight. Three different cross sectional area designs were tested to determine decomposition efficiency, temperature reaction propensity, optimum flow rate, and temperature distribution across each bed. The products of decomposition were condensed to measure the oxygen released from decomposition. The results will be used to develop the basis for a micro catalytic bed design to implement into future miniature …