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Polarity Effects Of Aluminium Nitride Thin Films And Morphological Characterization Of Molybdenum Thin Films, Aseem Poudyal

Mechanical Engineering ETDs

AlN (Aluminium Nitride) is a piezoelectric material that is often used in numerous applications as a transducer. C-axis crystal orientation control of AlN is very important as it corresponds to a high piezoelectric coefficient. Crystal orientation of sputtered AlN is strongly affected by its deposition parameters such as sputtering pressure, target to substrate distance, growth temperature, gas pressure and frequency/duty cycle in the case of pulsed DC sputtering. Crystal orientation of AlN depends on the energy of the sputtered atom and the mobility of the adatoms on the surface of the substrate. Varying the deposition parameters can alter the kinetic …