Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 3 of 3
Full-Text Articles in Engineering
In-Line Photoresist Thickness Monitor, Richard N. Savage, Tom W. Batchelder, Kenneth M. Sautter, Gary H. Memovich
In-Line Photoresist Thickness Monitor, Richard N. Savage, Tom W. Batchelder, Kenneth M. Sautter, Gary H. Memovich
Materials Engineering
An in-line photoresist thickness measuring device wherein a plurality of projection optical fibers are disposed over a wafer processing track for illuminating portions of a wafer as the wafer proceeds along the track. The light scattered back from each illuminated portion is detected by a corresponding plurality of pickup optical fibers and communicated to an optical fiber multiplexer. The multiplexer sequentially selects the optical signal from each pickup optical fiber and communicates the light from the selected pickup optical fiber to a spectrometer. The spectrometer simultaneously diffuses the scattered light into a plurality of light bands, each light band having …
Real-Time, In-Situ Measurement Of Film Thickness And Uniformity During Plasma Ashing Of Photoresist, Richard N. Savage, Horace Simmons, John T. Davies, Thomas Metz
Real-Time, In-Situ Measurement Of Film Thickness And Uniformity During Plasma Ashing Of Photoresist, Richard N. Savage, Horace Simmons, John T. Davies, Thomas Metz
Materials Engineering
This paper will discuss the performance of equipment which monitors and so controls photoresist thickness and uniformity during plasma ashing without interfering with the process. Practical monitoring of a subtractive process of this type is significantly more complex than monitoring deposition processes. An initial absolute thickness measurement is needed. In addition the device must view the layer through a luminous medium and cannot rely on simple optical interference fringe counting. The equipment is self-calibrating and sensitive to layers dnm thick. An application to partial plasma resist ashing in high uniformity equipment will be described. Application to other films (e. g. …
Optical Switch, Richard N. Savage
Optical Switch, Richard N. Savage
Materials Engineering
An optical switch for transmitting light between a first location and a selected one of a plurality of second locations. The switch includes a mirror having a concave, reflective surface and an axis. The switch also includes a plurality of fiber optic cables, one of which is disposed at the first location and the remainder of which are disposed at the second locations, each cable having a light transmission face at their respective locations. The light transmission face at the first location is substantially parallel to the focal plane of the mirror. The light transmission face at each of the …