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Full-Text Articles in Engineering
Investigation And Development Of Air Bridges, Jay Cabacungan
Investigation And Development Of Air Bridges, Jay Cabacungan
Journal of the Microelectronic Engineering Conference
A study was done in order to develop a fabrication process for creating air bridges at RIT’s Semiconductor and Microsystems Fabrication Laboratory (SMFL). Process development looked at three key factors (i) a robust lithography process that would produce the necessary rounded profile for fabricating air bridges (ii) sputter deposition vs. evaporation as metal deposition techniques (iii) the strength of the structures by testing the maximum distance an air bridge could span, the minimum and maximum thickness the structure could support, and the dimensions of the support posts. Several samples were fabricated testing the three different factors studied and SEM micrographs …
Design And Fabrication Of A Micro-Size Thermionic Ionization/Flame Ionization Detector For Gas Phase Chemical Analytes, Robert Manley
Design And Fabrication Of A Micro-Size Thermionic Ionization/Flame Ionization Detector For Gas Phase Chemical Analytes, Robert Manley
Journal of the Microelectronic Engineering Conference
A simple, MEMS base micro-chemical detector utilizing the principles of gas ionization, has been designed and fabricated. The device contains a polysilicon micro air-bridge heater structure with integrated polysilicon electrodes. The design of the devices allows it not only functions via thermionic emission, but also via chemi-ionization if a proper Pt catalyst is applied and it is operated in an environment containing hydrogen. When properly biased the device has been shown to heat to high temperatures where thermionic emission can begin to occur. Hydrocarbon chemicals in the gas phase have shown to ionize, via thermionic ionization and have been collected, …
Fabrication And Characterization Of A Packaged Mems Gas Flow Sensor, Vee Chee Hwang
Fabrication And Characterization Of A Packaged Mems Gas Flow Sensor, Vee Chee Hwang
Journal of the Microelectronic Engineering Conference
A surface micromachined MEMS gas flow sensor has been fabricated and tested. The fabrication process of the device was presented. The heater glowed red hot when a voltage of 27V was applied if the underlying LTO was completely etched away. Both the upstream and downstream resistors changed when temperature changed. A proof of concept showing that output voltage changes with gas flow was shown.