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Fabrication Of A Magnetically Actuated Torsional Beam, Gary A. Fino

Journal of the Microelectronic Engineering Conference

A mesoscopic magnetic beam contained in a silicon frame attached to the bulk of a silicon wafer with pivoting hinges will be used to show the affects of magnetic fields on movable magnetic structures. The pivoting hinges will be etched out of silicon using a Deep Reactive Ion Etcher (DRIE) system and the dimensions of the hinges will determine the force required to deflect the beam. Below each end of the beam will be large copper inductor coils fabricated on a separate wafer. When a current is applied to the coil, the magnetic field generated will attract the beam towards …