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Investigation Of A Silicon Bulk Etched Incandescent Light Source, Keith A. Roehner
Investigation Of A Silicon Bulk Etched Incandescent Light Source, Keith A. Roehner
Journal of the Microelectronic Engineering Conference
An attempt of fabricating an incandescent light source was made at Rochester Institute of Technology. Filament length, width, material and shape as well as encapsulation method were under investigation in the experiment. Due to a design flaw, the devices could not be tested for functionality. This has since been fixed and another attempt will be made to fabricate the devices.