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Combining Monte Carlo Transport And Level Set Surface Evolution For Modeling Vapor Phase Deposition Of Thin Films Over Sub-Micron Features, John Lewis Smith
Combining Monte Carlo Transport And Level Set Surface Evolution For Modeling Vapor Phase Deposition Of Thin Films Over Sub-Micron Features, John Lewis Smith
Graduate Theses - Chemical Engineering
A hybrid scheme is used to model the vapor phase deposition of thin films at the feature scale. The transport of the chemical species to the substrate surface is modeled with a Collisionless Direct Simulation Monte Carlo (DSMC) method. The Level Set Method is used to model the growth of the thin-film on the substrate. The convergence criteria for these methods were not found in literature.
The governing equations for the Level Set Method are, in general, non-linear partial differential equations. The coupling of the DSMC Method with the Level Set Method results in a set of non-Gaussian stochastic non-linear …