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Berkovich Indentation Of Diamondlike Carbon Coatings On Silicon Substrates, Ayesha J. Haq, Paul Munroe, Mark Hoffman, Phil Martin, Avi Bendavid
Berkovich Indentation Of Diamondlike Carbon Coatings On Silicon Substrates, Ayesha J. Haq, Paul Munroe, Mark Hoffman, Phil Martin, Avi Bendavid
Faculty of Engineering and Information Sciences - Papers: Part A
The deformation behavior of diamondlike carbon (DLC) coatings on silicon substrates induced by Berkovich indentation has been investigated. DLC coatings deposited by a plasma-assisted chemical vapor deposition technique were subjected to nanoindentation with a Berkovich indenter over a range of maximum loads from 100 to 300 mN. Distinct pop-ins were observed for loads greater than 150 mN. However, no pop-out was observed for the loads studied. The top surface of the indents showed annular cracks with associated fragmented material. The cross sections showed up to 20% localized reduction in thickness of the DLC coating beneath the indenter tip. Cracking, {111} …