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Modeling And Feedback Control Of A Mems Electrostatic Actuator, Jason Edwards
Modeling And Feedback Control Of A Mems Electrostatic Actuator, Jason Edwards
ETD Archive
This thesis describes the mathematical modeling and closed-loop voltage control of a MEMS electrostatic actuator. The control goal is to extend the travel range of the actuator beyond the open-loop pull-in limit of one third of the initial gap. Three controller designs are presented to reach the control goal. The first controller design utilizes a regular fourth order Active Disturbance Rejection Controller (ADRC) and is able to achieve 97 of the maximum travel range. The second design also uses a fourth order ADRC, while additional modeling information is included in an Extended State Observer (ESO), which is part of the …
Non-Collocation Problems In Dynamics And Control Of Mechanical Systems, Timothy M. Obrzut
Non-Collocation Problems In Dynamics And Control Of Mechanical Systems, Timothy M. Obrzut
ETD Archive
Characteristics of mechanical systems with non-collocated sensors and actuators are investigated. Transfer function zeros location as a function of sensor position, zero-pole interlacing, and re-location of zeros are discussed in a context of presented examples. Some of the presented examples involving non-collocation are supported by experimental data. A case study involving a high speed machining spindle is examined. The control problems associated with non-collocation are studied along with the methods to solve them