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Silicon Based Micro Components For Use In Chemical Agent Detection, Scott R. Forrest
Silicon Based Micro Components For Use In Chemical Agent Detection, Scott R. Forrest
Doctoral Dissertations
The objective of this work was to model, fabricate and test silicon based micro components for applications in chemical agent detection. Part I deals with research done on tunable micro Fabry-Perot interferometers. These devices are designed for use in identifying chemicals that absorb radiation in the infrared range of the spectrum. Part II deals with research done on novel Layer by Layer (LbL) assembled enzyme microreactors. These devices are designed for use in identifying chemicals that absorb radiation in the ultraviolet and visible range of the spectrum.
The emphasis of Part I is on the design and modeling of Fabry-Perot …