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Mathematical Modeling For Fabricating A Microstructure With A Pre-Specified Geometry Using Laser -Induced Chemical Vapor Deposition, Chaoyang Zhang
Mathematical Modeling For Fabricating A Microstructure With A Pre-Specified Geometry Using Laser -Induced Chemical Vapor Deposition, Chaoyang Zhang
Doctoral Dissertations
Laser-induced chemical vapor deposition (LCVD) is an emerging new technique with many practical applications. To optimize the system for fabricating a microstructure with a pre-specified geometry in pyrolytic LCVD, a three-dimensional mathematical model is developed for predicting temperature distributions and laser dwell times across the substrate scanned by the laser beam. A microstructure is fabricated layer by layer, and for each layer the laser beam moves from one pixel to the next. The complicated correlations among temperature distribution, deposit growth rate, and laser dwell time are investigated. A purely heterogeneous reaction is assumed and any gas-phase transport is ignored.
A …