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Application Of An Inverse-Hysteresis Iterative Control Algorithm For Afm Fabrication, Seth Ashley
Application Of An Inverse-Hysteresis Iterative Control Algorithm For Afm Fabrication, Seth Ashley
Theses and Dissertations
An iterative control algorithm (ICA) which uses an approximate inverse-hysteresis model is implemented to compensate for hysteresis to precisely fabricate features on a soft polymer substrate using an atomic force microscope (AFM). The AFM is an important instrument in micro/nanotechnology because of its ability to interrogate, manipulate, and fabricate objects at the micro/nanoscale. The AFM uses a piezoelectric actuator to position an AFM-probe tip relative to the sample surface in three dimensions. In particular, precision lateral control of the AFM-probe tip relative to the sample surface is needed to ensure high-performance operation of the AFM. However, precision lateral positioning of …