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A Mems Planar Fresnel Lens For Cmut Array, Shivani Nilesh Upadhyay
A Mems Planar Fresnel Lens For Cmut Array, Shivani Nilesh Upadhyay
Electronic Theses and Dissertations
This thesis presents a Microelectromechanical Systems (MEMS) planar Fresnel lens for use with a Capacitive Micromachined Ultrasonic Transducer (CMUT) array for high-resolution cardiac diagnostic imaging applications. The research exploited the excellent sound propagation and thermal properties of cross-linked silica aerogel, a nano-porous, nano-networked ultra-light-weight material, to design a planar thinfilm lens that can be easily microfabricated or integrated with a CMUT array. The designed lens, comprised of 32 various width concentric rings, was optimized to operate with a 256 element 6 MHz CMUT array. The 4 µm thick lens was designed to generate a 1.9 mm focal spot at a …
Design, Analysis And Fabrication Of Capacitive Micromachined Resonator – Based Mass Sensors, Muhammed Umair Nathani
Design, Analysis And Fabrication Of Capacitive Micromachined Resonator – Based Mass Sensors, Muhammed Umair Nathani
Electronic Theses and Dissertations
A challenge in greenhouses is the presence of various pests, virus, and bacteria. Although many pest management strategies are available, however, they all depend on visually identifying these invasive forces when they have eradicated the crop. To avoid the impacts on the agricultural sector due to such pests, early detection is required. Therefore, in this thesis MEMS-based capacitive mass resonators are proposed for early detection of such invasive forces through identifying their released volatile organic compounds (VOCs). In this work, multiple moving membrane capacitive micromachined ultrasonic transducer (M3-CMUT) as a mass sensor is proposed due to its advantages shared with …