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Preparation And Characterization Of Dc Magnetron Sputtered Thin Films, Al Amin
Preparation And Characterization Of Dc Magnetron Sputtered Thin Films, Al Amin
Theses and Dissertations
Plasma enhanced DC magnetron sputtering is a well-known technique for thin film deposition. Thin film has wide range of applications in many fields such as electronics, optics, communication, decoration, biosystem and medical. Among them, antibacterial and biocompatible thin film coating has attracted researcher’s attention to prevent the healthcare-associated infections (HAIs) during the surgical operations as well as the implantation of foreign devices inside human body. This research has been divided into two sections. In first section, titanium (Ti) was deposited on glass substrate at DC power of 200 W, argon-nitrogen plasma, and temperature of 25 ˚C. Later this Ti-coated glass …