Engineering Commons^™

Mechanical Characterization Of Polysilicon Mems: A Hybrid Tmcmc/Pod-Kriging Approach, Ramin Mirzazadeh, Saeed Eftekhar Azam, Stefano Mariani

Department of Civil and Environmental Engineering: Faculty Publications

Microscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach. An on-chip testing device was designed and fabricated to deform a compliant polysilicon beam. In previous studies, we showed that the scattering in the input–output characteristics of the device can be properly described only if statistical features related to the morphology of the columnar polysilicon film and to the etching process adopted to release the movable structure are taken into account. In this work, a high fidelity finite element model of the …