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Optical Lithography Simulation Using Wavelet Transform, Rance Rodrigues
Optical Lithography Simulation Using Wavelet Transform, Rance Rodrigues
Masters Theses 1911 - February 2014
Optical lithography is an indispensible step in the process flow of Design for Manufacturability (DFM). Optical lithography simulation is a compute intensive task and simulation performance, or lack thereof can be a determining factor in time to market. Thus, the efficiency of lithography simulation is of paramount importance. Coherent decomposition is a popular simulation technique for aerial imaging simulation. In this thesis, we propose an approximate simulation technique based on the 2D wavelet transform and use a number of optimization methods to further improve polygon edge detection. Results show that the proposed method suffers from an average error of less …