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Magnetron Sputtering Of Ni-Ti Thin Film Simulation By Using Embedded Atom Model, Ajit Behera
Magnetron Sputtering Of Ni-Ti Thin Film Simulation By Using Embedded Atom Model, Ajit Behera
Ajit Behera
Nickel-Titanium Thinfilm shape memory alloys formed by sputtering have been promising candidates for the realization of powerful actuators in microelectromechanical systems (MEMS) such as micro valves, micro fluid pumps and micromanipulators. In order to increase the actuation response of the microactuator utilizing SMA thin films, it is necessary to study the sputtering process parameter. The present work simulates the movement of Ni and Ti atoms on NiTi film During impingement, revealed re-sputtering, which is manipulated by Classical molecular dynamics simulation.