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Dual Beam Actuation Of Piezoelectric Aln Rf Mems Switches Integrated With Aln Contour-Mode Resonators, Nipun Sinha, Rashed Mahamameed, Chengjie Zuo, Marcelo B. Pisani, Carlos R. Perez, Gianluca Piazza
Dual Beam Actuation Of Piezoelectric Aln Rf Mems Switches Integrated With Aln Contour-Mode Resonators, Nipun Sinha, Rashed Mahamameed, Chengjie Zuo, Marcelo B. Pisani, Carlos R. Perez, Gianluca Piazza
Marcelo B Pisani
This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5-20 V), facilitates active pull-off to open the switch and fast switching times (1 to 2 µsec). This work also presents the combined response (cascaded S-parameters) of a resonator and a switch that were co-fabricated on the same substrate. The response shows that the resonator can be effectively turned on and off by the switch. A …