Engineering Commons^™

Mems Multi-Actuated Bridge Switch, D Cabrera, L Fuller

Journal of the Microelectronic Engineering Conference

A MEMS multi-actuated bridge switch is developed and created using the RIT sub-micron CMOS process as a way to create a high speed switch with good isolation, power consumption and low loss. The bridge was imaged using a SEM before and after the bridge release. Not much difference could be seen, prompting further investigation. There was a suspicious looking bump in the middle of the bridge that led us to believe that the TEOS sacrificial layer was buried underneath polysilicon. A cross-cut of the bridge was done where the bumps could be seen transversally. A highlight etch was done, confirming …