Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Engineering
Modeling And Simulation Of Low Temperature Activation Processes, James D. Driscoll
Modeling And Simulation Of Low Temperature Activation Processes, James D. Driscoll
Journal of the Microelectronic Engineering Conference
A method for simulating dopant activation at low temperatures is proposed and tested, with a proof of concept showing the expected behavior implemented.