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Portland State University

Dissertations and Theses

Theses/Dissertations

2021

Chemical vapor deposition

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Development Of Graphene Synthesis And Characterization Techniques Toward Cmos Applications And Beyond, Otto Kno Zietz Jan 2021

Development Of Graphene Synthesis And Characterization Techniques Toward Cmos Applications And Beyond, Otto Kno Zietz

Dissertations and Theses

Graphene exhibits mechanical and electrical properties which, coupled with its two dimensional (2D) morphology, make it an attractive material component for inclusion in a wide range of industries. Since the discovery of graphene in 2004, industry adoption has been limited due to the demanding synthesis requirements for high quality and connected graphene as well as the difficulties associated with direct incorporation. Chemical vapor deposition (CVD) has emerged as the most cost efficient method for producing high quality graphene at scales suitable for mass production. However, the 1000°C temperatures and micrometer thick catalysts required for this process preclude direct inclusion in …