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The Effects Of Deposition Conditions On Rf Sputtered Gallium Tin Zinc Oxide Thin Film Transistors, Tanina Bradley
The Effects Of Deposition Conditions On Rf Sputtered Gallium Tin Zinc Oxide Thin Film Transistors, Tanina Bradley
Dissertations
Thin film transistors (TFTs) were fabricated with a transparent amorphous gallium tin zinc oxide (GSZO) channel layer. GSZO is a promising, low cost replacement for the commonly used indium gallium zinc oxide (IGZO).The transistors were fabricated on Si substrates to optimize performance prior to transferring device production to flexible substrates. This dissertation will address the effects of deposition and post-deposition parameters on the film properties and interface traps. It will also address the parameters’ resultant effects on device performance and stability with the use of various characterization techniques. Film properties were studied using x-ray diffraction (XRD) and transmission measurements to …