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Fabrication And Characterization Of Microcrystalline Silicon Solar Cells, Liwei Li

Dissertations

In this study, single junction p-i-n μc-Si:H solar cells were prepared using plasma of silane diluted by hydrogen in a low-cost, single chamber, non-load-locked RF-PECVD system. Direct structural characterization of μc-Si:H solar cells, rather than stand-alone films, was conducted using Raman Spectroscopy, XRD, and AFM. Strong correlations among device deposition, i-layer structural properties, and device performance have been established. With such correlations, critical issues in fabricating low-cost, large-scale, high performance μc-Si:H solar cells were identified.

The critical importance of seeding processes in determining the microstructure of μc-Si:H i-layers and performance of μc-Si:H solar cells has been demonstrated. Using …