Engineering Commons^™

Modeling Of Quad-Station Module Cluster Tools Using Petri Nets, Aung Nay

Theses

The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net …

A Comparison Of Software Engines For Simulation Of Closed-Loop Control Systems, Sanket D. Nikam

Theses

A wide array of control system design and simulation software engines is available in market. It includes MATLAB-Simulink, LabVIEW, Maple-MapleSim, Scilab-Scicos, VisSim and Mathematica-Control Professional Suite (CPS). Among all of them MATLAB-Simulink is dominant and widely used software engine. The main aim of this study is to implement different state space control methods for non-linear Furuta pendulum system in each one of them and to compare performance against MATLAB-Simulink.

Different parameters like learning curve, interoperability, flexibility, control design tools, documentation and tech support are considered for efficiency comparison. It is shown that MapleSim has multi-body intuitive physical modeling (acausal) approach …