Engineering Commons^™

Modeling And Simulation Of Surface Profile Forming Process Of Microlenses And Their Application In Optical Interconnection Devices, Zhengyu Miao

LSU Doctoral Dissertations

Free space micro-optical systems require to integrate microlens array, micromirrors, optical waveguides, beam splitter, etc. on a single substrate. Out-of-plane microlens array fabricated by direct lithography provides pre-alignment during mask fabrication stage and has the advantage of mass manufacturing at low cost. However, this technology requires precise control of the surface profile of microlenses, which is a major technical challenge. The quality control of the surface profile of microlenses limits their applications. In this dissertation, the surface forming process of the out-of-plane microlenses in UV-lithography fabrication was modeled and simulated using a simplified cellular automata model. The microlens array was …

Pdms Based Waveguides For Microfluidics And Eocb, Weiping Qiu

LSU Master's Theses

Due to the low cost, fast and ease of molding, PDMS has become one of the most popular materials for microfluidics devices, bioMEMS applications. Meanwhile, the integration of different functional components on to one single chip (or Lab on a Chip) is the dream for many scientists and engineers in the related area. In addition to the necessary mechanical components for accommodating the reactions, such as pumps, valves, mixers and so on, optical components such as waveguides, lens, interferers are all desired to be lumped into such a system.

The waveguide for such a system requires the material to have …

Small Footprint High Flow Rate Microdevice For Rare Target Cell Capture, Taehyun Park

LSU Doctoral Dissertations

A novel high flow rate cell capture design was introduced to overcome the limitations of the current technologies or methods for rare target cell capture. Even though the rare target cell capture using BioMEMS technology has great potential for cancer diagnosis, previous rare cell capture research could not overcome the limitations of low flow rate or low recovery rate. Rare cell research requires precise sample preparation for accurate results. A new method of preparation for a single or a precise number of target cell was introduced. Current sample preparation methods which are not suitable for rare cell research, such as …

Development Of A Compact Optical System For A Forward-Looking Endoscope, Anandi Kalyan Dutta

LSU Master's Theses

ABSTRACT Optical Coherence Tomography has been effectively used for endoscopy in many previous studies. In this work, a 2 mm diameter forward-looking endoscope is developed with the help of MEMS technology and Optical Coherence Technology (OCT) to obtain in-vivo cross-sectional images of tissues or body cavities. The design consists of a GRIN lens, optical fiber and MEMS chip that are placed in line to fulfill the aim of achieving a 2 mm diameter probe. A standard assembly process has been established for the probe. An anisotropic etching was performed on the sample chip to create the V-groove for carrying the …

Two-Dimensional Microscanners With T-Shaped Hinges And Piezoelectric Actuators, Wenyu Song

LSU Master's Theses

For a wide range of application areas such as medical instruments, defense, communication networks, industrial equipment, and consumer electronics, microscanners have been a vibrant research topic. Among various fabrication methodologies, MEMS (microelectromechanical system) stands out for its small size and fast response characteristics. In this thesis, piezoelectric actuation mechanism is selected because of its low voltage and low current properties compared with other mechanisms, which are especially important for the target application of biomedical imaging. Although 1- and 2-dimensional microscanners with piezoelectric actuators have been studied by several other groups, this thesis introduces innovative improvements in design of the piezoelectric …

Monolithic Integration Of High-Aspect-Ratio Microstructures With Cmos Circuitry, Tinghui Xin

LSU Doctoral Dissertations

This work involves developing processing techniques for monolithically integrating a high-aspect-ratio microstructures with CMOS circuitry. A microsystem comprising of a microprobe array and signal processing circuitry is utilized as a test vehicle to demonstrate this fabrication process. One potential application of this microsystem is for recording neural signals from the central nervous system. The main results include thick photoresist processing, DC and pulse electroplating to form high-aspect-ratio microprobes, microprobe sharpening and developing a post-IC monolithic integration process. SU-8 is utilized for thick photoresist application. This work focuses on realization of a deep microrecess array in thick resists rather than traditional …

Electrodeposited Metal Matrix Nanocomposites As Thin Films And High Aspect Ratio Microstructures For Mems, Alonso Lozano Morales

LSU Doctoral Dissertations

The electrodeposition of metal-matrix nanocomposites as thin film and high aspect ratio microstructures (HARM’s) for MicroElectroMechanical Systems (MEMS) components is examined. The effect of -Al2O3 nanopowder on copper reduction from acidic and basic electrolytes is examined with rotating disk electrodes (RDE’s). At pH 0.2, regions of copper inhibition and enhancement are identified in the kinetic regime. Low particle loading (12.5 g/L) results in an inhibited copper rate, while, high particle concentration (60 g/L) does both, inhibits the rate at low overpotentials and accelerates it at higher overpotentials, depending on the electrode rotation rate. At pH 8 the presence of particles …

Ultra-Violet Lithography Of Thick Photoresist For The Applications In Biomems And Micro Optics, Ren Yang

LSU Doctoral Dissertations

UV lithography of thick photoresist is widely used in microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). SU-8 is a typical negative tone thick photoresist for micro systems, and can be used for both structural material and pattern transfer. This dissertation presents an effort to comprehensively study these important subjects. The first part, and the most fundamental part of this dissertation concentrated on the numerical analysis and experimental study of the wavelength dependent absorbance of SU-8 and the diffraction effects on the sidewall profiles of the microstructures made using UV lithography of SU-8. This study has laid the foundation for all …

A Generalized Approach For The Control Of Micro-Electromechanical Relays, Mohamed Abdelrahman Younis

LSU Master's Theses

MEMS (Micro-Electromechanical Systems) is an area of research and applications that is becoming increasingly popular. It's mainly concerned with integrating micro-mechanical transducers with micro-electronic circuits on common substrates, traditionally silicon, through micro-fabrication. Instead of traditionally having the transducer and the communicating (or control) circuit as two separate entities, MEMS miniaturizes and combines them on a single chip, giving it several advantages, saving space, money, and increasing the sensitivity and accuracy of the integrated system. A micro-electromechanical relay is a type of MEM devices that is becoming increasingly important in a wide range of industries such as the computer industry, the …

Simulations And Experimental Analysis Of High-Aspect-Ratio Diffusive Micro-Mixers, Amit Maha

LSU Master's Theses

Passive (diffusional) mixing has been used in designing high-aspect-ratio micro-mixers for the purpose of performing the Liagase Detection Reaction (LDR). A simple model was used to design such mixers optimized for pressure drop or time required to deliver a prescribed volume of mixture. The types of mixers considered are simple, cheap, and durable and can perform over a broad range of volumetric flow rates at reasonably modest pressure drops. The fluids typically have a very low diffusion coefficient of=1.2x10^10m^2/s, and thus diffusional mixing can only be effective in high-aspect-ratio micro-channels. A realizable aspect ratio of 6 has been considered initially …

Laterally Movable Gate Field Effect Transistor (Lmgfet) For Microsensor And Microactuator Applications, In-Hyouk Song

LSU Doctoral Dissertations

Laterally Movable Gate Field Effect Transistor (LMGFET) invented at LSU as a microactuator is the subject of study in this research. The gate moving in lateral direction in a LMGFET changes channel width but keeps the channel length and the gap between the metal gate and the gate oxide constant. LMGFET offers linear change in drain current with gate motion and a large displacement range. This research is the first demonstration of LMGFET. In this dissertation, a post-IC LIGA-like process for LMGFET microstructure fabrication has been developed that is compatible with monolithic integration with CMOS circuitry. A two-mask post-IC process …

Design And Fabrication Of Electromagnetic Micro-Relays Using The Uv-Liga Technique, John Dalton Williams

LSU Doctoral Dissertations

This dissertation reports a research effort to microfabricate an electromagnetic relay for power applications using a multilayer UV-LIGA process. A mechanically wrapped coil was used and very simple design for the magnetic circuit was adopted to increase the design flexibility and performances. The broad material selection and the capability of making high aspect ratio microstructures of the UV-LIGA make the technology best suited for fabricating microelectromechanical power relays. Fabrication of the device required significant advances in the optical lithography of SU-8 negative photoresist. Research proved that aspect-ratios up to 40:1 in isolated open field structures of thickness between 1 and …

Manufacturing And Analysis Of A Liga Heat Exchanger For The Surface Of A Tube: A Cooling Simulation Of The Leading Edge Region Of A Turbine Blade, Christophe Marques

LSU Doctoral Dissertations

Fabricating nickel micro heat exchangers directly on planar or non-planar metal surfaces has been demonstrated using the LIGA micromachining process. These heat exchangers can effectively control the temperature of surfaces in high heat flux applications. Of particular interest is the temperature control of gas turbine engine components. The locations in the gas turbine engine where improved, efficient cooling is required includes gas turbine blades, stator vanes, the turbine disk, and the combustor liner. In this dissertation, the primary application of interest is the use of such heat exchangers to cool airfoils such as turbine blades. In the first part of …

The Rapid Template Fabrication Process For Producing A Liga Heat Exchanger Bonded To A Mechanical Seal, Jason Patrick Tuma

LSU Master's Theses

Mechanical seals are widely used in the chemical processing, aerospace, and automotive, industries. When a mechanical seal fails, considerable cost is typically involved in replacing the seal. Most seal failures are a result of high temperatures generated by frictional heating. Effectively removing the heat generated would significantly increase the mechanical seal’s work life and lead to significant monetary savings. One method of removing the heat generated is bonding an effective LIGA micro heat exchanger to the mechanical seal and forcing coolant through the heat exchanger. Previous work on this subject revealed promising results, especially for micro heat exchangers with microstructures …

Electrodeposition Of Nickel-Copper Alloys And Nickel-Copper-Alumina Nanocomposites Into Deep Recesses For Mems, Amrit Panda

LSU Doctoral Dissertations

Electrodeposition is an important component in the fabrication of micro electro mechanical systems (MEMS). Nickel is the most commonly used material to produce three dimensional microstructures and few material alternatives have been demonstrated. In this dissertation, electrodeposited Ni-Cu alloys and nanocomposites are investigated as possible replacements for nickel in microsystems. Ni-Cu alloys are attractive for their corrosion resistance, magnetic and thermophysical properties. Alumina nanoparticulates included into metal matrices improve hardness and tribology of deposits. The Ni-Cu alloys and Ni-Cu-g-Al2O3 nanocomposites were electrodeposited from a citrate electrolyte, both at low and high pH. Electrodeposition experiments were performed in recessed microelectrodes 500 …

Development Of A Micro Power Relay With Static Electrical Actuator, Ren Yang

LSU Master's Theses

In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. …