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Engineering Conferences International
Nanomechanical Testing in Materials Research and Development V
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Fundamental Nanomechanic Investigations Using Combinatorial Deposition Techniques, Rachel Schoeppner, Aidan Taylor, Jakob Schwiedrzik, Gaurav Mohanty, Vipin Chawala, Lazlo Petho, Keith Thomas, Johannes Zecher, Carlos Guerra-Nuñez, Johann Michler
Fundamental Nanomechanic Investigations Using Combinatorial Deposition Techniques, Rachel Schoeppner, Aidan Taylor, Jakob Schwiedrzik, Gaurav Mohanty, Vipin Chawala, Lazlo Petho, Keith Thomas, Johannes Zecher, Carlos Guerra-Nuñez, Johann Michler
Nanomechanical Testing in Materials Research and Development V
Combinatorial materials design of thin films allows for the investigation of broad ranges of both thickness and composition within a single sample; this can be utilized both for fundamental nanomechanics investigations and for the optimization of thin films for engineering applications. Using a unique self-constructed deposition chamber that combines magnetron sputtering, e-beam evaporation, nanoparticle deposition and atomic layer deposition (ALD), the architectural design of thin films can be tailored to study multiple physical and chemical properties.
Recent investigations have focused on using this chamber’s unique ability to create a gradient composition film of up to three different materials with a …