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Development Of A Silicon Nanowire Mask Using Scanning Probe Microscopy, Ross Gregoriev
Development Of A Silicon Nanowire Mask Using Scanning Probe Microscopy, Ross Gregoriev
Master's Theses
Scanning probe microscopy techniques were used to investigate the desorption of hydrogen passivated silicon to form SiO2 etch masks The application of the etch masks were planned on being used to manufacture silicon nanowires. Low concentration hydrofluoric acid was used to passivate the surface. The surface was selectively depassivated by SPM techniques. Scanning tunneling microscopy (STM) and atomic force microscopy (AFM) were used to create the masks. The STM system used was found to desorb hydrogen from the surface faster than the STM could image and was considered incapable in the configuration investigated. This led to the use of atomic …
Design, Implementation, And Test Of A Micro Force Displacement System, Evan Derek Cate
Design, Implementation, And Test Of A Micro Force Displacement System, Evan Derek Cate
Master's Theses
The design and implementation of a micro-force displacement system was completed to test the force-displacement characteristics of square silicon diaphragms with side lengths of 4mm, 5mm, and 7mm with a thickness of 10um. The system utilizes a World Precision Instruments Fort 10g force transducer attached to a World Precession Instruments TBM4M amplifier. A Keithley 2400 source meter provided data acquisition of the force component of the system. A micro prober tip was utilized as the testing probe attached to the force transducer with a tip radius of 5um. The displacement of samples was measured using a Newport M433 linear stage …