Open Access. Powered by Scholars. Published by Universities.®
- Discipline
- Publication
Articles 1 - 4 of 4
Full-Text Articles in Engineering
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
Ghz Range Nanoscaled Aln Contour-Mode Resonant Sensors (Cmr-S) With Self-Sustained Cmos Oscillator, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Ghz Range Nanoscaled Aln Contour-Mode Resonant Sensors (Cmr-S) With Self-Sustained Cmos Oscillator, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operating at frequencies above 1 GHz and connected to a chip-based CMOS oscillator circuit for direct frequency read-out. This work shows that by scaling the CMR-S to 250 nm in thickness and by operating at high frequencies (1 GHz) a limit of detection of ~35 zg/µm2 and a fast response time (<1 >ms) can be attained. In addition, the capability to detect concentrations of volatile organic compounds such as 2,6 dinitroluene (DNT) …
Beyond Sensor-Assisted Diagnosis Of Used Products, Kishore K. Pochampally, Srikanth Vadde, Sagar V. Kamarthi, Surendra M. Gupta
Beyond Sensor-Assisted Diagnosis Of Used Products, Kishore K. Pochampally, Srikanth Vadde, Sagar V. Kamarthi, Surendra M. Gupta
Surendra M. Gupta
It is difficult to obtain information regarding compositions and remaining life periods of used products. Hence, they often undergo partial or complete disassembly for subsequent re-processing (remanufacturing and/or recycling). However, researchers are now studying sensor embedded products (SEPs), the composition and remaining life of which can be obtained at the end of their use from sensors. This paper addresses decision-making regarding the futurity of an SEP at its end of use: whether to disassemble it for subsequent recycling/remanufacturing or to repair it for subsequent sale on a second-hand market. We identify some important factors that must be considered before making …
Ss-Dna Functionalized Ultra-Thin-Film Aln Contour-Mode Resonators With Self-Sustained Oscillator For Volatile Organic Chemical Detection, Matteo Rinaldi, Brandon Duick, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Ss-Dna Functionalized Ultra-Thin-Film Aln Contour-Mode Resonators With Self-Sustained Oscillator For Volatile Organic Chemical Detection, Matteo Rinaldi, Brandon Duick, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of nanoscale gravimetric sensors based on ultra-thin-film AlN Contour-Mode Resonant Sensor (CMR-S) functionalized with ss-DNA and connected to a chip-based self-sustaining oscillator loop (fabricated in the ON Semiconductor 0.5 μm CMOS process) for direct frequency read-out. The 220 MHz oscillator based on the ultra-thin AlN CMR-S exhibits an Allan Variance of ∼20 Hz for 100 ms gate time. The sensor affinity for the adsorption of volatile organic chemicals such as 2,6 dinitroluene (DNT, a simulant for explosive vapors) is enhanced by functionalizing the top gold electrode of …