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Purdue University

2008

ATOMIC LAYER DEPOSITION; FUNCTIONALIZATION

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Full-Text Articles in Engineering

Externally Assembled Gate-All-Around Carbon Nanotube Field-Effect Transistor, Zhihong Chen, Damon Farmer, Sheng Xu, Roy Gordon, Phaedon Avouris, Joerg Appenzeller Feb 2008

Externally Assembled Gate-All-Around Carbon Nanotube Field-Effect Transistor, Zhihong Chen, Damon Farmer, Sheng Xu, Roy Gordon, Phaedon Avouris, Joerg Appenzeller

Other Nanotechnology Publications

In this letter, we demonstrate a gate-all-around single-wall carbon nanotube field-effect transistor. This is the first successful experimental implementation of an off-chip gate and gate-dielectric assembly with subsequent deposition on a suitable substrate. The fabrication process and device measurements are discussed in the letter. We also argue in how far charges in the gate oxide are responsible for the observed nonideal device performance.