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Design And Implementation Of A Micro Force Displacement System, Evan Cate
Design And Implementation Of A Micro Force Displacement System, Evan Cate
Materials Engineering
The design and implementation of a micro-force displacement system was completed to test various Micro-Electro-Mechanical Systems (MEMS) devices including silicon diaphragms and cantilevers. The system utilizes a World Precision Instruments Fort 10g force transducer attached to a World Precession Instruments TBM4M amplifier. A Keithley 2400 source meter provided data acquisition of the force component of the system. A micro prober tip was utilized as the testing probe attached to the force transducer with a tip radius of 5um. The displacement of samples was measured using a Newport M433 linear stage driven by a Newport ESP300 motion controller (force readings at …