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Semiconductor and Optical Materials

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2015

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Determination Of Work Functions In The Ta1-XAlXNY/Hfo2 Advanced Gate Stack Using Combinatorial Methodology, Kao-Shuo Chang, Martin Green, Jason Hattrick-Simpers, Ichiro Takeuchi, J. Suehle, O. Celik, S. De Gendt Mar 2015

Determination Of Work Functions In The Ta1-XAlXNY/Hfo2 Advanced Gate Stack Using Combinatorial Methodology, Kao-Shuo Chang, Martin Green, Jason Hattrick-Simpers, Ichiro Takeuchi, J. Suehle, O. Celik, S. De Gendt

Jason R. Hattrick-Simpers

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