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Plasma

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Full-Text Articles in Engineering

High Resolution Time-Resolved Imaging System In The Vacuum Ultraviolet Region, Yuseong Jang Jan 2014

High Resolution Time-Resolved Imaging System In The Vacuum Ultraviolet Region, Yuseong Jang

Electronic Theses and Dissertations

High-power debris-free vacuum ultraviolet (VUV) light sources have applications in several scientific and engineering areas, such as high volume manufacturing lithography and inspection tools in the semiconductor industry, as well as other applications in material processing and photochemistry. For the past decades, the semiconductor industry has been driven by what is called "Moore's Law". The entire semiconductor industry relies on this rule, which requires chip makers to pack transistors more tightly with every new generation of chips, shrinking the size of transistors. The ability to solve roadmap challenges is, at least partly, proportional to our ability to measure them. The …


The Effects Of Electrode Geometry On Current Pulse Caused By Electrical Discharge Over An Ultra-Fast Laser Filament, Matthew Bubelnik Jan 2005

The Effects Of Electrode Geometry On Current Pulse Caused By Electrical Discharge Over An Ultra-Fast Laser Filament, Matthew Bubelnik

Electronic Theses and Dissertations

The time-resolved electrical conductivity of a short-pulse generated plasma filament in air was studied. Close-coupled metal electrodes were used to discharge the stored energy of a high-voltage capacitor and the resulting microsecond-scale electrical discharge was measured using fast current sensors. Significant differences in the time dependence of the current were seen with the two electrode geometries used. Using sharp-tipped electrodes additional peaks in the time-resolved conductivity were seen, relative to the single peak seen with spherical electrodes. We attribute these additional features to secondary electron collisional ionization brought about by field enhancement at the tips. Additional discrepancies in the currents …