Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 2 of 2
Full-Text Articles in Engineering
High Resolution Time-Resolved Imaging System In The Vacuum Ultraviolet Region, Yuseong Jang
High Resolution Time-Resolved Imaging System In The Vacuum Ultraviolet Region, Yuseong Jang
Electronic Theses and Dissertations
High-power debris-free vacuum ultraviolet (VUV) light sources have applications in several scientific and engineering areas, such as high volume manufacturing lithography and inspection tools in the semiconductor industry, as well as other applications in material processing and photochemistry. For the past decades, the semiconductor industry has been driven by what is called "Moore's Law". The entire semiconductor industry relies on this rule, which requires chip makers to pack transistors more tightly with every new generation of chips, shrinking the size of transistors. The ability to solve roadmap challenges is, at least partly, proportional to our ability to measure them. The …
Plasma Processes And Polymers Special Issue On: Plasma And Cancer, Mounir Laroussi, Michael Keidar
Plasma Processes And Polymers Special Issue On: Plasma And Cancer, Mounir Laroussi, Michael Keidar
Electrical & Computer Engineering Faculty Publications
During the last two decades, research efforts on the application of low temperature plasmas in biology and medicine have positioned nonequilibrium lowtemperature plasmas as a technology that has the potential of revolutionizing healthcare.[1,2] Low temperature plasmas can be applied in direct contact with living tissues to inactivate bacteria,[3] to disinfect wounds and accelerate wound healing,[4] and to induce damage in some cancer cells.[5–11]