Engineering Commons^™

Design, Modeling, Fabrication, And Testing Of A Multistage Micro Gas Compressor With Piezoelectric Unimorph Diaphragm And Passive Microvalves For Microcooling Applications, Shawn Thanhson Le

Doctoral Dissertations

This dissertation investigates the development of a multistage micro gas compressor utilizing multiple pump stages cascaded in series to increase the pressure rise with passive microvalves and piezoelectric unimorph diaphragms. This research was conducted through modeling, simulation, design, and fabrication of the microcompressor and its components. A single-stage and a two-stage microcompressor were developed to demonstrate and compare the performance and effectiveness of using a cascaded multistage design.

Steady fluid flow through static microvalves structure was studied to gain insight on its gas flow dynamics and characteristics. Transient analysis combined with the structure's interaction was investigated with an analytical model …

A Hybrid Finite Element-Finite Difference Method For Thermal Analysis In A Double-Layered Thin Film, Teng Zhu

Doctoral Dissertations

Thin film technology is of vital importance in microtechnology applications. For instance, thin films of metals, of dielectrics such as SiO2, or Si semiconductors are important components of microelectronic devices. The reduction of the device size to the microscale has the advantage of enhancing the switching speed of the device. The reduction, on the other hand, increases the rate of heat generation that leads to a high thermal load on the microdevice. Heat transfer at the microscale with an ultrafast pulsed-laser is also a very important process for thin films. Hence, studying the thermal behavior of thin films or of …

Kinetics Of Laser Chemical Vapor Deposition Of Carbon And Refractory Metals, Feng Gao

Doctoral Dissertations

Three-dimensional laser chemical vapor deposition (3D-LCVD) has been used to grow rods of carbon, tungsten, titanium, and hafnium from a variety of hydrocarbons and metal halide-based precursors. A novel computerized 3D-LCVD system was designed and successfully used in the experiments. A focused Nd:Yag laser beam (λ = 1.06 μm) was utilized to locally heat up a substrate to deposition temperature. The rods, which grew along the axis of the laser beam, had a typical diameter of 30–80 μm and a length of about 1 mm. The precursors for carbon deposition were the alkynes: propyne, butyne, pentyne, hexyne, and octyne. Propyne …