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Articles 1 - 9 of 9
Full-Text Articles in Engineering
The Effect Of Frictional And Adhesion Forces Attributed To Slurry Particles On The Surface Quality Of Polished Copper, Yi-Koan Hong, Ja-Hyung Han, Tae-Gon Kim, Jin-Goo Park, Ahmed A. Busnaina
The Effect Of Frictional And Adhesion Forces Attributed To Slurry Particles On The Surface Quality Of Polished Copper, Yi-Koan Hong, Ja-Hyung Han, Tae-Gon Kim, Jin-Goo Park, Ahmed A. Busnaina
Ahmed A. Busnaina
The effect of frictional and adhesion forces attributed to slurry particles on the quality of copper surfaces was experimentally investigated during copper chemical mechanical planarization process. The highest frictional force of 9 Kgf and adhesion force of 5.83 nN were observed in a deionized water-based alumina slurry. On the other hand, the smallest frictional force of 4 Kgf and adhesion force of 0.38 nN were measured in an alumina slurry containing citric acid. However, frictional (6 Kgf) and adhesion (1 nN) forces of silica particles in the slurry were not significantly changed regardless of the addition of citric acid. These …
The Effect Of Frictional And Adhesion Forces Attributed To Slurry Particles On The Surface Quality Of Polished Copper, Yi-Koan Hong, Ja-Hyung Han, Tae-Gon Kim, Jin-Goo Park, Ahmed A. Busnaina
The Effect Of Frictional And Adhesion Forces Attributed To Slurry Particles On The Surface Quality Of Polished Copper, Yi-Koan Hong, Ja-Hyung Han, Tae-Gon Kim, Jin-Goo Park, Ahmed A. Busnaina
Ahmed A. Busnaina
The effect of frictional and adhesion forces attributed to slurry particles on the quality of copper surfaces was experimentally investigated during copper chemical mechanical planarization process. The highest frictional force of 9 Kgf and adhesion force of 5.83 nN were observed in a deionized water-based alumina slurry. On the other hand, the smallest frictional force of 4 Kgf and adhesion force of 0.38 nN were measured in an alumina slurry containing citric acid. However, frictional (6 Kgf) and adhesion (1 nN) forces of silica particles in the slurry were not significantly changed regardless of the addition of citric acid. These …
Wear Resistant Polydopamine/Ptfe Nanoparticle Composite Coating For Dry Lubrication Applications, Samuel George Beckford
Wear Resistant Polydopamine/Ptfe Nanoparticle Composite Coating For Dry Lubrication Applications, Samuel George Beckford
Graduate Theses and Dissertations
This dissertation presents an investigation into the effect of nanoparticle fillers and a polydopamine adhesive primer on the tribological performance of thin PTFE films. The principal objective of this investigation was to reduce wear in PTFE films, an issue which precludes the use of PTFE films in tribological applications requiring high durability. The friction and wear of the composite films were evaluated using a ball-on-flat configuration in linear reciprocating motion. It was found that the use of a polydopamine adhesive primer reduces the wear of PTFE films more than 600 times. X-ray photoelectron spectroscopy (XPS) results show that a tenacious …
High Speed Atomic Force Microscopy Techniques For The Efficient Study Of Nanotribology, James L. Bosse
High Speed Atomic Force Microscopy Techniques For The Efficient Study Of Nanotribology, James L. Bosse
Master's Theses
As mechanical devices scale down to micro/nano length scales, it is crucial to understand friction and wear at the nanoscale (nanotribology) especially at technically relevant sliding velocities. Accordingly, three novel techniques have been developed to study nanotribology, leveraging recent advances in high speed AFM. The first method utilizes high line-scanning rates coupled with sinusoidal scanning along the AFM fast scan axis, enabling rapid friction measurements as a function of velocity up to 20 mm/sec. The second method rapidly acquires friction versus force curves through disabling the feedback loop during scanning and relating the resulting lateral data with the correspondingly varying …
Analysis Of Scratches Formed On Oxide Surface During Chemical Mechanical Planarization, Jae-Gon Choi, Y. Prasad, In-Kwon Kim, In-Gon Kim, Woo-Jin Kim, Ahmed Busnaina, Jin-Goo Park
Analysis Of Scratches Formed On Oxide Surface During Chemical Mechanical Planarization, Jae-Gon Choi, Y. Prasad, In-Kwon Kim, In-Gon Kim, Woo-Jin Kim, Ahmed Busnaina, Jin-Goo Park
Jin-Goo Park
Scratch formation on patterned oxide wafers during the chemical mechanical planarization process was investigated. Silica and ceria slurries were used for polishing the experiments to observe the effect of abrasives on the scratch formation. Interlevel dielectric patterned wafers were used to study the scratch dimensions, and shallow trench isolation patterned wafers were used to study the effect of polishing parameters, such as pressure and rotational speed (head/platen). Similar shapes of scratches (chatter type) were observed with both types of slurries. The length of the scratch formed might be related to the period of contact between the wafer and the pad. …
The Effect Of Frictional And Adhesion Forces Attributed To Slurry Particles On The Surface Quality Of Polished Copper, Yi-Koan Hong, Ja-Hyung Han, Tae-Gon Kim, Jin-Goo Park, Ahmed Busnaina
The Effect Of Frictional And Adhesion Forces Attributed To Slurry Particles On The Surface Quality Of Polished Copper, Yi-Koan Hong, Ja-Hyung Han, Tae-Gon Kim, Jin-Goo Park, Ahmed Busnaina
Jin-Goo Park
The effect of frictional and adhesion forces attributed to slurry particles on the quality of copper surfaces was experimentally investigated during copper chemical mechanical planarization process. The highest frictional force of 9 Kgf and adhesion force of 5.83 nN were observed in a deionized water-based alumina slurry. On the other hand, the smallest frictional force of 4 Kgf and adhesion force of 0.38 nN were measured in an alumina slurry containing citric acid. However, frictional (6 Kgf) and adhesion (1 nN) forces of silica particles in the slurry were not significantly changed regardless of the addition of citric acid. These …
Analysis Of Scratches Formed On Oxide Surface During Chemical Mechanical Planarization, Jae-Gon Choi, Y. Nagendra Prasad, In-Kwon Kim, In-Gon Kim, Woo-Jin Kim, Ahmed A. Busnaina, Jin-Goo Park
Analysis Of Scratches Formed On Oxide Surface During Chemical Mechanical Planarization, Jae-Gon Choi, Y. Nagendra Prasad, In-Kwon Kim, In-Gon Kim, Woo-Jin Kim, Ahmed A. Busnaina, Jin-Goo Park
Ahmed A. Busnaina
Scratch formation on patterned oxide wafers during the chemical mechanical planarization process was investigated. Silica and ceria slurries were used for polishing the experiments to observe the effect of abrasives on the scratch formation. Interlevel dielectric patterned wafers were used to study the scratch dimensions, and shallow trench isolation patterned wafers were used to study the effect of polishing parameters, such as pressure and rotational speed (head/platen). Similar shapes of scratches (chatter type) were observed with both types of slurries. The length of the scratch formed might be related to the period of contact between the wafer and the pad. …
Identification Of Multiple Oscillation States Of Carbon Nanotube Tipped Cantilevers Interacting With Surfaces In Dynamic Atomic Force Microscopy, Mark Strus, Arvind Raman
Identification Of Multiple Oscillation States Of Carbon Nanotube Tipped Cantilevers Interacting With Surfaces In Dynamic Atomic Force Microscopy, Mark Strus, Arvind Raman
Birck and NCN Publications
Carbon nanotubes (CNTs) have gained increased interest in dynamic atomic force microscopy (dAFM) as sharp, flexible, conducting, nonreactive tips for high-resolution imaging, oxidation lithography, and electrostatic force microscopy. By means of theory and experiments we lay out a map of several distinct tapping mode AFM oscillation states for CNT tipped AFM cantilevers: namely, noncontact attractive regime oscillation, intermittent contact with CNT slipping or pinning, or permanent contact with the CNT in point or line contact with the surface while the cantilever oscillates with large amplitude. Each state represents fundamentally different origins of CNT-surface interactions, CNT tip-substrate dissipation, and phase contrast …
Static Friction And Surface Roughness Studies Of Surface Micromachined Electrostatic Micromotors Using An Atomic Force/Friction Force Microscope, Sriram Sundararajan, Bharat Bhushan
Static Friction And Surface Roughness Studies Of Surface Micromachined Electrostatic Micromotors Using An Atomic Force/Friction Force Microscope, Sriram Sundararajan, Bharat Bhushan
Sriram Sundararajan
A technique to measure the static friction forces (stiction) encountered in surface micromachined micromotors using a commercial atomic force microscope (AFM)/friction force microscope has been developed and is described. An AFM tip is pushed against a rotor arm of the micromotor so as to generate lateral deflection (torsion) of the tip, which is measured by the AFM. The maximum value of the lateral deflection obtained prior to rotor movement (rotation) is a measure of the static friction force of the micromotors. This technique was employed to study the effect of humidity and rest time on the static friction force of …