Engineering Commons^™

Converting Parylene C Into A Thin Film Piezoelectric Material, Murali Manohar Duggina

Nanoscience and Microsystems ETDs

Thin-film piezoelectric materials are increasing in demand, but most materials are stiff ceramic materials. Polyvinylidene fluoride (PVDF) is a common polymer piezoelectric material, but it has limitations such as it requires post-processing steps to promote appropriate β-phase and it has a low operating and Curie Temperature, which limits its use in traditional microfabrication processing. The toxicity of PZT makes it incompatible with biomedical applications. Therefore, there is a need to develop a new class of polymer piezoelectric films that are compatible with current microfabrication methods. Parylene C (PA-C) is a chemical vapor deposited semi-crystalline polymer material with a nonsymmetric polymer …